With tighter design limits and the escalating need to increase yield and reduce costs, automated defect inspection in compound semiconductor processing is more critical than ever. KLA-Tencor’s Candela semiconductor inspection tool combines the elemental principles of scatterometry, ellipsometry, reflectometry, and topographical analysis to detect and classify defects in substrates, epi-layers, and process films. Candela semiconductor inspection technology is being used by industry leaders in LED, GaAs, SiC and sapphire industries to monitor production lines, identify mission critical defects of interest, and create process-specific recipes to detect and classify killer defects while ignoring nuisance defects.

Defect Inspection