Our Lifecycle Portfolio of service agreements supports mature factories where reducing cost and minimizing risk are essential. The Lifecycle portfolio is offered in Core, CoPay, and Basic configurations to help customers choose the correct balance of price and productivity.

ONLY KLA-TENCOR SERVICES:

• Delivers the expertise to service highly complex inspection and metrology systems
• Ensures customers achieve the required uptime with uncompromising sensitivity and precision
• Provides a broad portfolio of service agreements to meet the requirements of both leading edge and mature factories

KLA-Tencor Services continuously invests in a service infrastructure of expert personnel, parts, logistics, tooling, diagnostics, documentation, systems and processes to deliver superior support of KLA-Tencor tools worldwide.