AcuShape™ is the most flexible measurement solution for enabling Optical Critical Dimension (OCD) measurements of complex structures for advanced devices, both in production and R&D. This optical critical dimension (CD) measurement software package enables offline model creation and on-tool wafer measurements of two-dimensional and three-dimensional device structures. Jointly developed by KLA-Tencor and TEL, AcuShape optical critical dimension (CD) measurement software is supported by the resources of two industry-leading companies. AcuShape optical critical dimension (CD) measurement software is currently released on the SpectraCD-200 system. Availability on other SpectraCD systems will be announced in the coming months.

• Fully flexible 2D and 3D modeling enables measurement of finFET, bulb RCAT, spacer pitch splitting, and other advanced structures
• Fast library generation (generally 10x faster than previous-generation software) reduces development time for new optical critical dimension (CD) measurement models and libraries and lets users obtain production-ready results quickly
• Small library size promotes easy sharing and distribution throughout the fab
• Step-by-step modeling guides the user through the process of creating a library and gives feedback to assist in optimization

AcuShape Generator 4160: The ASG4160 is KLA-Tencor’s latest-generation high-speed library generation server. Featuring a total of 160 processor cores, the AcuShape Generator enables rapid library generation for reduced time-to-measurement.

AcuShape Modeling Station: The AMS workstation allows users to create models and begin library generation on the AcuShape Generator. Each user of an AMS can utilize a portion of the available ASG resources to seamlessly generate optical critical dimension (CD) libraries from anywhere on the local network.

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